Thermo Scientific™ SURF-CAL™ Particle Size Standards

Simplify the preparation of calibration wafers with these particle size standards.

Product Code	Brand	Concentration	Diameter (Metric)
11884862	Thermo Scientific™ PD-047	3 x 10^8 particles/mL	0.047 μm
11894862	Thermo Scientific™ PD-047B	1 x 10¹° particles/mL	0.047 μm
11804872	Thermo Scientific™ PD-064	3 x 10^8 particles/mL	0.064 μm
11814872	Thermo Scientific™ PD-064B	1 x 10¹° particles/mL	0.064 μm
11824872	Thermo Scientific™ PD-083	3 x 10^8 particles/mL	0.083 μm
11834872	Thermo Scientific™ PD-083B	1 x 10¹° particles/mL	0.083 μm
11844872	Thermo Scientific™ PD-092	3 x 10^8 particles/mL	0.092 μm
11854872	Thermo Scientific™ PD-092B	1 x 10¹° particles/mL	0.092 μm
11864872	Thermo Scientific™ PD-100	3 x 10^8 particles/mL	0.100 μm
11874872	Thermo Scientific™ PD-100B	1 x 10¹° particles/mL	0.100 μm
11884892	Thermo Scientific™ PD1100	3 x 10^8 particles/mL	1.112 μm
11894892	Thermo Scientific™ PD1100B	1 x 10¹° particles/mL	1.112 μm
11804882	Thermo Scientific™ PD-155	3 x 10^8 particles/mL	0.155 μm
11814882	Thermo Scientific™ PD-155B	1 x 10¹° particles/mL	0.155 μm
11804902	Thermo Scientific™ PD1600	3 x 10^8 particles/mL	1.59 μm
11824882	Thermo Scientific™ PD-200	3 x 10^8 particles/mL	0.202 μm
11814902	Thermo Scientific™ PD2000	3 x 10^8 particles/mL	2.01 μm
11834882	Thermo Scientific™ PD-200B	1 x 10¹° particles/mL	0.202 μm
11844882	Thermo Scientific™ PD-204	3 x 10^8 particles/mL	0.204 μm
11854882	Thermo Scientific™ PD-204B	1 x 10¹° particles/mL	0.204 μm
11864882	Thermo Scientific™ PD-215	3 x 10^8 particles/mL	0.220 μm
11874882	Thermo Scientific™ PD-215B	1 x 10¹° particles/mL	0.220 μm
11824902	Thermo Scientific™ PD3000	3 x 10^8 particles/mL	3.04 μm
11884882	Thermo Scientific™ PD-305	3 x 10^8 particles/mL	0.304 μm
11894882	Thermo Scientific™ PD-305B	1 x 10¹° particles/mL	0.304 μm
11804892	Thermo Scientific™ PD-365	3 x 10^8 particles/mL	0.360 μm
11814892	Thermo Scientific™ PD-365B	1 x 10¹° particles/mL	0.360 μm
11824892	Thermo Scientific™ PD-500	3 x 10^8 particles/mL	0.498 μm
11834892	Thermo Scientific™ PD-500B	1 x 10¹° particles/mL	0.498 μm
11844892	Thermo Scientific™ PD-800	3 x 10^8 particles/mL	0.809 μm
11854892	Thermo Scientific™ PD-800B	1 x 10¹° particles/mL	0.809 μm
11864892	Thermo Scientific™ PD-802	3 x 10^8 particles/mL	0.802 μm
11874892	Thermo Scientific™ PD-802B	1 x 10¹° particles/mL	0.802 μm

Description

Simplify the preparation of calibration wafers with Thermo Scientific™ SURF-CAL™ Particle Size Standards, for calibration and maintenance of Scanning Surface Inspection Systems (SSIS). Available particle sizes correspond to the calibration point sizes required by instrument manufacturers.

Thermo Fisher Scientific™, along with the Semiconductor Industry and SEMI, have established specific particle sizes to be used when calibrating Scanning Surface Inspection Systems. Working with instrument manufacturers, we created the SURF-CAL™ product line to meet SEMI standard guidelines.

• Available sizes are considered to be critical sizing nodes as defined by the International Technology Roadmap for Semiconductors (ITRS).
• By depositing SURF-CAL™ NIST™ traceable polystyrene latex spheres (PSL) on specially selected wafers, you can perform periodic calibration checks and compare your scanner with scanners at other locations.
• You can also assess the performance of your SSIS at critical stages in the manufacturing process.
• All products are suspended in deionized, filtered water in 50mL bottles at a concentration of 3 × 10⁸ particles per mL.

Note:

Products PD1100 and smaller are also available at 10¹⁰ particles per mL for applications using the aid of a Differential Mobility Analyzer (DMA) or other size exclusionary techniques.

Specifications

• Additive: None
• Contents: Polystyrene microspheres in deionized, filtered water
• Material: Polystyrene
• Includes: Certificate of Calibration and Traceability to NIST
• Quantity: 50 mL
• Stability: Product stable for a minimum of 12 months

• Content And Storage: Unless otherwise stated, refrigerate (2° to 8°C) product when not in use but do not freeze. Store upright and keep bottle tightly sealed. Mix product with gentle inversion by hand or vortex mixer.
• For Use With (Application): SSIS Calibration and Maintenance
• Product Type: Size Standard Particles
• Particle Density: 1.05g/cm³
• Refractive Index: 1.59 at 589nm (25°C)